BibTeX record journals/ipsj/AwadTTK17

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@article{DBLP:journals/ipsj/AwadTTK17,
  author       = {Ahmed Awad and
                  Atsushi Takahashi and
                  Satoshi Tanaka and
                  Chikaaki Kodama},
  title        = {Intensity Difference Map {(IDM)} Accuracy Analysis for {OPC} Efficiency
                  Verification and Further Enhancement},
  journal      = {{IPSJ} Trans. Syst. {LSI} Des. Methodol.},
  volume       = {10},
  pages        = {28--38},
  year         = {2017},
  url          = {https://doi.org/10.2197/ipsjtsldm.10.28},
  doi          = {10.2197/IPSJTSLDM.10.28},
  timestamp    = {Mon, 01 May 2023 13:02:29 +0200},
  biburl       = {https://dblp.org/rec/journals/ipsj/AwadTTK17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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