BibTeX record journals/integration/HaldHSLSB18

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@article{DBLP:journals/integration/HaldHSLSB18,
  author       = {Axel Hald and
                  Pekka Herzogenrath and
                  J{\"{u}}rgen Scheible and
                  Jens Lienig and
                  Johannes Seelhorst and
                  Peter Brandl},
  title        = {Full custom {MEMS} design: {A} new method for the analysis of motion-dependent
                  parasitics},
  journal      = {Integr.},
  volume       = {63},
  pages        = {362--372},
  year         = {2018},
  url          = {https://doi.org/10.1016/j.vlsi.2018.02.004},
  doi          = {10.1016/J.VLSI.2018.02.004},
  timestamp    = {Thu, 20 Feb 2020 13:21:36 +0100},
  biburl       = {https://dblp.org/rec/journals/integration/HaldHSLSB18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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