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BibTeX record journals/information/0001AGVB23
@article{DBLP:journals/information/0001AGVB23, author = {Aris Magklaras and Panayiotis Alefragis and Christos Gogos and Christos Valouxis and Alexios N. Birbas}, title = {A Genetic Algorithm-Enhanced Sensor Marks Selection Algorithm for Wavefront Aberration Modeling in Extreme-UV {(EUV)} Photolithography}, journal = {Inf.}, volume = {14}, number = {8}, pages = {428}, year = {2023}, url = {https://doi.org/10.3390/info14080428}, doi = {10.3390/INFO14080428}, timestamp = {Sat, 13 Jan 2024 17:37:46 +0100}, biburl = {https://dblp.org/rec/journals/information/0001AGVB23.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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