BibTeX record journals/ijmtm/PackirisamySF05

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@article{DBLP:journals/ijmtm/PackirisamySF05,
  author       = {Muthukuruman Packirisamy and
                  Ion Stiharu and
                  L. Flores},
  title        = {Roughness characterisation of gas phase micromachining process suitable
                  for fabricating silicon based microsystems},
  journal      = {Int. J. Manuf. Technol. Manag.},
  volume       = {7},
  number       = {2/3/4},
  pages        = {224--245},
  year         = {2005},
  url          = {https://doi.org/10.1504/IJMTM.2005.006842},
  doi          = {10.1504/IJMTM.2005.006842},
  timestamp    = {Thu, 04 Jun 2020 19:36:18 +0200},
  biburl       = {https://dblp.org/rec/journals/ijmtm/PackirisamySF05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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