BibTeX record journals/ijces/SunMZIS03

download as .bib file

@article{DBLP:journals/ijces/SunMZIS03,
  author       = {Tietun Sun and
                  Jianmin Miao and
                  Hong Zhu and
                  Ciprian Iliescu and
                  Jianbo Sun},
  title        = {Study On Feature Of Silicon Microtrenches With {A} Multiplexed Inductively
                  Coupled Plasma Etcher},
  journal      = {Int. J. Comput. Eng. Sci.},
  volume       = {4},
  number       = {2},
  pages        = {319--322},
  year         = {2003},
  url          = {https://doi.org/10.1142/S1465876303001174},
  doi          = {10.1142/S1465876303001174},
  timestamp    = {Thu, 09 Jul 2020 22:44:40 +0200},
  biburl       = {https://dblp.org/rec/journals/ijces/SunMZIS03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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