BibTeX record journals/ijces/LiZL03

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@article{DBLP:journals/ijces/LiZL03,
  author       = {J. Li and
                  Q. X. Zhang and
                  A. Q. Liu},
  title        = {Prevent Notching For Soi Microstructure Fabrication Using SIO\({}_{\mbox{2}}\)
                  Thin Film Technique},
  journal      = {Int. J. Comput. Eng. Sci.},
  volume       = {4},
  number       = {3},
  pages        = {577--580},
  year         = {2003},
  url          = {https://doi.org/10.1142/S1465876303001794},
  doi          = {10.1142/S1465876303001794},
  timestamp    = {Thu, 09 Jul 2020 22:44:40 +0200},
  biburl       = {https://dblp.org/rec/journals/ijces/LiZL03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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