BibTeX record journals/ijces/KongWM03

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@article{DBLP:journals/ijces/KongWM03,
  author       = {Jong Ren Kong and
                  Oliver Wilhelmi and
                  Herbert O. Moser},
  title        = {Gap Optimisation For Proximity X-Ray Lithography Using The Super-Resolution
                  Process},
  journal      = {Int. J. Comput. Eng. Sci.},
  volume       = {4},
  number       = {3},
  pages        = {585--588},
  year         = {2003},
  url          = {https://doi.org/10.1142/S1465876303001812},
  doi          = {10.1142/S1465876303001812},
  timestamp    = {Thu, 09 Jul 2020 22:44:37 +0200},
  biburl       = {https://dblp.org/rec/journals/ijces/KongWM03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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