GessnerBLKH03'

BibTeX

@article{DBLP:journals/ijces/GessnerBLKH03,
  author    = {Thomas Gessner and
               Andreas Bertz and
               Christian Lohmann and
               Steffen Kurth and
               Karla Hiller},
  title     = {Advanced Silicon Micromachining},
  journal   = {International Journal of Computational Engineering Science},
  volume    = {4},
  number    = {2},
  year      = {2003},
  pages     = {151},
  ee        = {http://dx.doi.org/10.1142/S146587630300082X},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}