A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process.

Dongil Cho Hyoungho Ko Jongpal Kim Sangjun Park Donghun Kwak Taeyong Song William Carr James Bus A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. 493-496 2003 4 International Journal of Computational Engineering Science 3 http://dx.doi.org/10.1142/S1465876303001599 db/journals/ijces/ijces4.html#ChoKKPKSCB03