BibTeX record journals/ijces/ChoCLPPPPKJ03

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@article{DBLP:journals/ijces/ChoCLPPPPKJ03,
  author       = {Dong{-}Il Cho and
                  Byoung{-}Doo Choi and
                  Sangwoo Lee and
                  Seung Joon Paik and
                  Sangjun Park and
                  Jaehong Park and
                  Yonghwa Park and
                  Jongpal Kim and
                  Il{-}Woo Jung},
  title        = {Dry And Wet Etching With {(111)} Silicon For High-Performance Micro
                  And Nano Systems},
  journal      = {Int. J. Comput. Eng. Sci.},
  volume       = {4},
  number       = {2},
  pages        = {181--187},
  year         = {2003},
  url          = {https://doi.org/10.1142/S1465876303000879},
  doi          = {10.1142/S1465876303000879},
  timestamp    = {Thu, 09 Jul 2020 22:44:35 +0200},
  biburl       = {https://dblp.org/rec/journals/ijces/ChoCLPPPPKJ03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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