DBLP Record 'journals/ijces/ChoCLPPPPKJ03'

BibTeX

@article{DBLP:journals/ijces/ChoCLPPPPKJ03,
  author    = {Dong-Il Cho and
               Byoung-Doo Choi and
               Sangwoo Lee and
               Seung Joon Paik and
               Sangjun Park and
               Jaehong Park and
               Yonghwa Park and
               Jongpal Kim and
               Il-Woo Jung},
  title     = {Dry And Wet Etching With (111) Silicon For High-Performance
               Micro And Nano Systems},
  journal   = {International Journal of Computational Engineering Science},
  volume    = {4},
  number    = {2},
  year      = {2003},
  pages     = {181-187},
  ee        = {http://dx.doi.org/10.1142/S1465876303000879},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}