Thin Silicon Structures Fabrication By Wet Anisotropic Etching.

Ajay Agarwal Xiao Lin Zhang Terence Gan Janak Singh Thin Silicon Structures Fabrication By Wet Anisotropic Etching. 311-314 2003 4 International Journal of Computational Engineering Science 2 http://dx.doi.org/10.1142/S1465876303001150 db/journals/ijces/ijces4.html#AgarwalZGS03