DBLP Record 'journals/ijces/AgarwalZGS03'

BibTeX

@article{DBLP:journals/ijces/AgarwalZGS03,
  author    = {Ajay Agarwal and
               Xiao Lin Zhang and
               Terence Gan and
               Janak Singh},
  title     = {Thin Silicon Structures Fabrication By Wet Anisotropic Etching},
  journal   = {International Journal of Computational Engineering Science},
  volume    = {4},
  number    = {2},
  year      = {2003},
  pages     = {311-314},
  ee        = {http://dx.doi.org/10.1142/S1465876303001150},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}