BibTeX record journals/ijcat/ZhangWMSZG07

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@article{DBLP:journals/ijcat/ZhangWMSZG07,
  author       = {Y. C. Zhang and
                  Y. F. Wu and
                  S. G. Ma and
                  S. N. Sun and
                  Y. Zhou and
                  M. Geng},
  title        = {Preparation and performance study of TiN films deposited by {MF} unbalanced
                  magnetron sputtering technique},
  journal      = {Int. J. Comput. Appl. Technol.},
  volume       = {29},
  number       = {2/3/4},
  pages        = {173--177},
  year         = {2007},
  url          = {https://doi.org/10.1504/IJCAT.2007.015257},
  doi          = {10.1504/IJCAT.2007.015257},
  timestamp    = {Thu, 17 Sep 2020 12:04:36 +0200},
  biburl       = {https://dblp.org/rec/journals/ijcat/ZhangWMSZG07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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