BibTeX record journals/ijcat/LinLC06

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@article{DBLP:journals/ijcat/LinLC06,
  author       = {Yeou{-}Yih Lin and
                  Ship{-}Peng Lo and
                  Cheng{-}Yung Chen},
  title        = {Strain and stress analysis of the oxide film surface in the chemical
                  mechanical polishing process},
  journal      = {Int. J. Comput. Appl. Technol.},
  volume       = {26},
  number       = {4},
  pages        = {233--241},
  year         = {2006},
  url          = {https://doi.org/10.1504/IJCAT.2006.010768},
  doi          = {10.1504/IJCAT.2006.010768},
  timestamp    = {Thu, 17 Sep 2020 12:04:24 +0200},
  biburl       = {https://dblp.org/rec/journals/ijcat/LinLC06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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