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BibTeX record journals/ijcat/LinLC06
@article{DBLP:journals/ijcat/LinLC06, author = {Yeou{-}Yih Lin and Ship{-}Peng Lo and Cheng{-}Yung Chen}, title = {Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process}, journal = {Int. J. Comput. Appl. Technol.}, volume = {26}, number = {4}, pages = {233--241}, year = {2006}, url = {https://doi.org/10.1504/IJCAT.2006.010768}, doi = {10.1504/IJCAT.2006.010768}, timestamp = {Thu, 17 Sep 2020 12:04:24 +0200}, biburl = {https://dblp.org/rec/journals/ijcat/LinLC06.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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