BibTeX record journals/ijat/TaniguchiMI11

download as .bib file

@article{DBLP:journals/ijat/TaniguchiMI11,
  author       = {Jun Taniguchi and
                  Tetsuro Manabe and
                  Kiyoshi Ishikawa},
  title        = {Fabrication of Less than 20-nm-Diameter Nanodot Arrays Using Inorganic
                  Electron Beam Resist and Post Exposure Bake},
  journal      = {Int. J. Autom. Technol.},
  volume       = {5},
  number       = {3},
  pages        = {349--352},
  year         = {2011},
  url          = {https://doi.org/10.20965/ijat.2011.p0349},
  doi          = {10.20965/IJAT.2011.P0349},
  timestamp    = {Thu, 09 Jul 2020 22:55:57 +0200},
  biburl       = {https://dblp.org/rec/journals/ijat/TaniguchiMI11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.