BibTeX record journals/ijat/SatoT16

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@article{DBLP:journals/ijat/SatoT16,
  author       = {Michihiro Sato and
                  Yosuke Takahashi},
  title        = {Simulation of Dislocation Accumulation in Impurity Doped-ULSI Cells
                  and Electric Characteristic Evaluations},
  journal      = {Int. J. Autom. Technol.},
  volume       = {10},
  number       = {2},
  pages        = {195--200},
  year         = {2016},
  url          = {https://doi.org/10.20965/ijat.2016.p0195},
  doi          = {10.20965/IJAT.2016.P0195},
  timestamp    = {Thu, 09 Jul 2020 22:55:29 +0200},
  biburl       = {https://dblp.org/rec/journals/ijat/SatoT16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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