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BibTeX record journals/ijat/PermpatdechakulKSBI24
@article{DBLP:journals/ijat/PermpatdechakulKSBI24, author = {Thitipat Permpatdechakul and Panart Khajornrungruang and Keisuke Suzuki and Aran Blattler and Jiraphan Inthiam}, title = {Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field}, journal = {Int. J. Autom. Technol.}, volume = {18}, number = {1}, pages = {47--57}, year = {2024}, url = {https://doi.org/10.20965/ijat.2024.p0047}, doi = {10.20965/IJAT.2024.P0047}, timestamp = {Fri, 26 Jan 2024 07:57:18 +0100}, biburl = {https://dblp.org/rec/journals/ijat/PermpatdechakulKSBI24.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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