BibTeX record journals/ijat/HamzensKMUOK23

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@article{DBLP:journals/ijat/HamzensKMUOK23,
  author       = {Afif Hamzens and
                  Kento Kitamura and
                  Shota Mochizuki and
                  Leapheng Uon and
                  Hiromasa Ohmi and
                  Hiroaki Kakiuchi},
  title        = {Organosilicon-Based Thin Film Formation in Very High-Frequency Plasma
                  Under Atmospheric Pressure},
  journal      = {Int. J. Autom. Technol.},
  volume       = {17},
  number       = {6},
  pages        = {575--582},
  year         = {2023},
  url          = {https://doi.org/10.20965/ijat.2023.p0575},
  doi          = {10.20965/IJAT.2023.P0575},
  timestamp    = {Tue, 28 Nov 2023 20:06:02 +0100},
  biburl       = {https://dblp.org/rec/journals/ijat/HamzensKMUOK23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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