@article{DBLP:journals/ieicet/OkitaMHITMTSS09,
  author    = {Hideyuki Okita and
               Toshiharu Marui and
               Shinichi Hoshi and
               Masanori Itoh and
               Fumihiko Toda and
               Yoshiaki Morino and
               Isao Tamai and
               Yoshiaki Sano and
               Shouhei Seki},
  title     = {Comparisons of SiN Passivation Film Deposited by PE-CVD
               and T-CVD Method for AlGaN/GaN HEMTs on SiC Substrate},
  journal   = {IEICE Transactions},
  volume    = {92-C},
  number    = {5},
  year      = {2009},
  pages     = {686-690},
  ee        = {http://search.ieice.org/bin/summary.php?id=e92-c_5_686{\&}category=C{\&}year=2009{\&}lang=E{\&}abst=},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}