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BibTeX record journals/ieicet/MiyatakeI07
@article{DBLP:journals/ieicet/MiyatakeI07, author = {Hisakazu Miyatake and Takashi Ito}, title = {Improvement of ArF Photo Resist Pattern by {VUV} Cure}, journal = {{IEICE} Trans. Electron.}, volume = {90-C}, number = {5}, pages = {1006--1011}, year = {2007}, url = {https://doi.org/10.1093/ietele/e90-c.5.1006}, doi = {10.1093/IETELE/E90-C.5.1006}, timestamp = {Sat, 11 Apr 2020 14:48:43 +0200}, biburl = {https://dblp.org/rec/journals/ieicet/MiyatakeI07.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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