YodaETH04'

@article{DBLP:journals/ieiceee/YodaETH04,
  author    = {Takashi Yoda and
               Hirokazu Ezawa and
               Kaori Tsutsumi and
               Makoto Honda},
  title     = {The sprint process of Al interconnects with low-temperature
               PVD via filling},
  journal   = {IEICE Electronic Express},
  volume    = {1},
  number    = {9},
  year      = {2004},
  pages     = {263-268},
  ee        = {http://joi.jlc.jst.go.jp/JST.JSTAGE/elex/1.263},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}