Hiroyuki Uchiyama Takafumi Taniguchi Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. 46-50 2004 1 IEICE Electronic Express 2 http://joi.jlc.jst.go.jp/JST.JSTAGE/elex/1.46 db/journals/ieiceee/ieiceee1.html#UchiyamaT04