Hiroyuki Uchiyama Hiroshi Sato Kazunori Shinoda Akira Taike Takafumi Taniguchi Shinji Tsuji 1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas. 193-197 2004 1 IEICE Electronic Express 7 http://joi.jlc.jst.go.jp/JST.JSTAGE/elex/1.193 db/journals/ieiceee/ieiceee1.html#UchiyamaSSTTT04