BibTeX record journals/ieiceee/HanHO13

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@article{DBLP:journals/ieiceee/HanHO13,
  author       = {Dae{-}Hee Han and
                  Huiseong Han and
                  Shun'ichiro Ohmi},
  title        = {Impact of Si surface roughness on {MOSFET} characteristics with ultrathin
                  HfON gate insulator formed by {ECR} plasma sputtering},
  journal      = {{IEICE} Electron. Express},
  volume       = {10},
  number       = {18},
  pages        = {20130651},
  year         = {2013},
  url          = {https://doi.org/10.1587/elex.10.20130651},
  doi          = {10.1587/ELEX.10.20130651},
  timestamp    = {Fri, 12 Feb 2021 22:20:42 +0100},
  biburl       = {https://dblp.org/rec/journals/ieiceee/HanHO13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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