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BibTeX record journals/ibmrd/Wilson93
@article{DBLP:journals/ibmrd/Wilson93, author = {Alan D. Wilson}, title = {X-ray lithography in IBM, 1980-1992, the development years}, journal = {{IBM} J. Res. Dev.}, volume = {37}, number = {3}, pages = {299--318}, year = {1993}, url = {https://doi.org/10.1147/rd.373.0299}, doi = {10.1147/RD.373.0299}, timestamp = {Fri, 13 Mar 2020 10:54:10 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/Wilson93.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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