Satoshi Tsuji Katsuhiro Tsujimoto Hideo Iwama Application of cross-sectional transmission electron microscopy to thin-film-transistor failure analysis. 509-516 1998 42 IBM Journal of Research and Development 3 http://dx.doi.org/10.1147/rd.423.0509 db/journals/ibmrd/ibmrd42.html#TsujiTI98