TsujiTI98'

BibTeX

@article{DBLP:journals/ibmrd/TsujiTI98,
  author    = {Satoshi Tsuji and
               Katsuhiro Tsujimoto and
               Hideo Iwama},
  title     = {Application of cross-sectional transmission electron microscopy
               to thin-film-transistor failure analysis},
  journal   = {IBM Journal of Research and Development},
  volume    = {42},
  number    = {3},
  year      = {1998},
  pages     = {509-516},
  ee        = {http://dx.doi.org/10.1147/rd.423.0509},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}