BibTeX record journals/ibmrd/SmithS93

download as .bib file

@article{DBLP:journals/ibmrd/SmithS93,
  author       = {Henry I. Smith and
                  Mark L. Schattenburg},
  title        = {X-ray lithography from 500 to 30 nm: X-ray nanolithography},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {37},
  number       = {3},
  pages        = {319--330},
  year         = {1993},
  url          = {https://doi.org/10.1147/rd.373.0319},
  doi          = {10.1147/RD.373.0319},
  timestamp    = {Fri, 13 Mar 2020 10:55:03 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/SmithS93.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.