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BibTeX record journals/ibmrd/SilvermanRO93
@article{DBLP:journals/ibmrd/SilvermanRO93, author = {Jerome P. Silverman and Robert P. Rippstein and James M. Oberschmidt}, title = {X-ray lithography beamlines in the {IBM} Advanced Lithography Facility}, journal = {{IBM} J. Res. Dev.}, volume = {37}, number = {3}, pages = {395--410}, year = {1993}, url = {https://doi.org/10.1147/rd.373.0395}, doi = {10.1147/RD.373.0395}, timestamp = {Fri, 13 Mar 2020 10:54:25 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/SilvermanRO93.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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