BibTeX record journals/ibmrd/SilvermanRO93

download as .bib file

@article{DBLP:journals/ibmrd/SilvermanRO93,
  author       = {Jerome P. Silverman and
                  Robert P. Rippstein and
                  James M. Oberschmidt},
  title        = {X-ray lithography beamlines in the {IBM} Advanced Lithography Facility},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {37},
  number       = {3},
  pages        = {395--410},
  year         = {1993},
  url          = {https://doi.org/10.1147/rd.373.0395},
  doi          = {10.1147/RD.373.0395},
  timestamp    = {Fri, 13 Mar 2020 10:54:25 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/SilvermanRO93.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.