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@article{DBLP:journals/ibmrd/MoffatWEJ05,
author = {Thomas P. Moffat and
Daniel Wheeler and
Monica D. Edelstein and
Daniel Josell},
title = {Superconformal film growth: Mechanism and quantification},
journal = {IBM Journal of Research and Development},
volume = {49},
number = {1},
year = {2005},
pages = {19-36},
ee = {http://www.research.ibm.com/journal/rd/491/moffat.pdf},
bibsource = {DBLP, http://dblp.uni-trier.de}
}
Copyright © 2006-09-05 by Michael Ley (ley@uni-trier.de)