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BibTeX record journals/ibmrd/Meyerson00
@article{DBLP:journals/ibmrd/Meyerson00, author = {Bernard S. Meyerson}, title = {Low-temperature Si and Si: Ge epitaxy by ultrahigh vacuum/chemical vapor deposition: Process fundamentals}, journal = {{IBM} J. Res. Dev.}, volume = {44}, number = {1}, pages = {132--141}, year = {2000}, url = {https://doi.org/10.1147/rd.441.0132}, doi = {10.1147/RD.441.0132}, timestamp = {Fri, 13 Mar 2020 10:54:56 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/Meyerson00.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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