BibTeX record journals/ibmrd/LiebmannMWLLD01

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@article{DBLP:journals/ibmrd/LiebmannMWLLD01,
  author       = {Lars Liebmann and
                  Scott M. Mansfield and
                  Alfred K. Wong and
                  Mark A. Lavin and
                  William C. Leipold and
                  Timothy G. Dunham},
  title        = {{TCAD} development for lithography resolution enhancement},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {45},
  number       = {5},
  pages        = {651--666},
  year         = {2001},
  url          = {https://doi.org/10.1147/rd.455.0651},
  doi          = {10.1147/RD.455.0651},
  timestamp    = {Fri, 13 Mar 2020 10:54:18 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/LiebmannMWLLD01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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