LicataCHL95'

@article{DBLP:journals/ibmrd/LicataCHL95,
  author    = {Thomas J. Licata and
               Evan G. Colgan and
               James M. E. Harper and
               Stephen E. Luce},
  title     = {Interconnect fabrication processes and the development of
               low-cost wiring for CMOS products},
  journal   = {IBM Journal of Research and Development},
  volume    = {39},
  number    = {4},
  year      = {1995},
  pages     = {419-436},
  ee        = {http://dx.doi.org/10.1147/rd.394.0419},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}