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DBLP BibTeX Record 'journals/ibmrd/KuoOT99'

@article{DBLP:journals/ibmrd/KuoOT99,
  author    = {Yue Kuo and
               Kenji Okajima and
               Masatomo Takeichi},
  title     = {Plasma processing in the fabrication of amorphous silicon
               thin-film-transistor arrays},
  journal   = {IBM Journal of Research and Development},
  volume    = {43},
  number    = {1},
  year      = {1999},
  pages     = {73-88},
  ee        = {http://dx.doi.org/10.1147/rd.431.0073},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}