BibTeX record journals/ibmrd/Kuo92

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@article{DBLP:journals/ibmrd/Kuo92,
  author       = {Yue Kuo},
  title        = {Reactive ion etching technology in thin-film-transistor processing},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {36},
  number       = {1},
  pages        = {69--75},
  year         = {1992},
  url          = {https://doi.org/10.1147/rd.361.0069},
  doi          = {10.1147/RD.361.0069},
  timestamp    = {Fri, 13 Mar 2020 10:54:57 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/Kuo92.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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