BibTeX record journals/ibmrd/KoenigM00

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@article{DBLP:journals/ibmrd/KoenigM00,
  author       = {H. R. Koenig and
                  Leon I. Maissel},
  title        = {Application of rf discharges to sputtering},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {44},
  number       = {1},
  pages        = {106--111},
  year         = {2000},
  url          = {https://doi.org/10.1147/rd.441.0106},
  doi          = {10.1147/RD.441.0106},
  timestamp    = {Fri, 13 Mar 2020 10:54:50 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/KoenigM00.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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