KoenigM00'

BibTeX

@article{DBLP:journals/ibmrd/KoenigM00,
  author    = {H. R. Koenig and
               Leon I. Maissel},
  title     = {Application of rf discharges to sputtering},
  journal   = {IBM Journal of Research and Development},
  volume    = {44},
  number    = {1},
  year      = {2000},
  pages     = {106-111},
  ee        = {http://www.research.ibm.com/journal/rd/441/koenig.pdf},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}