BibTeX record journals/ibmrd/KnickerbockerADHIPPSSSSSTTWW08

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@article{DBLP:journals/ibmrd/KnickerbockerADHIPPSSSSSTTWW08,
  author       = {John U. Knickerbocker and
                  Paul S. Andry and
                  Bing Dang and
                  Raymond R. Horton and
                  Mario J. Interrante and
                  Chirag S. Patel and
                  Robert J. Polastre and
                  Katsuyuki Sakuma and
                  Ranjani Sirdeshmukh and
                  Edmund J. Sprogis and
                  Sri M. Sri{-}Jayantha and
                  Antonio M. Stephens and
                  Anna W. Topol and
                  Cornelia K. Tsang and
                  Bucknell C. Webb and
                  Steven L. Wright},
  title        = {Three-dimensional silicon integration},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {52},
  number       = {6},
  pages        = {553--569},
  year         = {2008},
  url          = {https://doi.org/10.1147/JRD.2008.5388564},
  doi          = {10.1147/JRD.2008.5388564},
  timestamp    = {Fri, 13 Mar 2020 10:54:33 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/KnickerbockerADHIPPSSSSSTTWW08.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}