Ito97'

BibTeX

@article{DBLP:journals/ibmrd/Ito97,
  author    = {Hiroshi Ito},
  title     = {Chemical amplification resists: History and development
               within IBM},
  journal   = {IBM Journal of Research and Development},
  volume    = {41},
  number    = {1{\&}2},
  year      = {1997},
  pages     = {69-80},
  ee        = {http://dx.doi.org/10.1147/rd.411.0069},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}