BibTeX record journals/ibmrd/HeynsBCGDGKKLMMMNSTVVW99

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@article{DBLP:journals/ibmrd/HeynsBCGDGKKLMMMNSTVVW99,
  author       = {Marc M. Heyns and
                  Twan Bearda and
                  Ingrid Cornelissen and
                  Stefan De Gendt and
                  Robin Degraeve and
                  Guido Groeseneken and
                  Conny Kenens and
                  D. Martin Knotter and
                  Lee M. Loewenstein and
                  Paul W. Mertens and
                  Sofie Mertens and
                  Marc Meuris and
                  Tanya Nigam and
                  Marc Schaekers and
                  Ivo Teerlinck and
                  Wilfried Vandervorst and
                  Rita Vos and
                  Klaus Wolke},
  title        = {Cost-effective cleaning and high-quality thin gate oxides},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {43},
  number       = {3},
  pages        = {339--350},
  year         = {1999},
  url          = {https://doi.org/10.1147/rd.433.0339},
  doi          = {10.1147/RD.433.0339},
  timestamp    = {Fri, 13 Mar 2020 10:54:32 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/HeynsBCGDGKKLMMMNSTVVW99.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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