BibTeX record journals/ibmrd/GuoC93

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@article{DBLP:journals/ibmrd/GuoC93,
  author       = {Jerry Z. Y. Guo and
                  Franco Cerrina},
  title        = {Modeling X-ray proximity lithography},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {37},
  number       = {3},
  pages        = {331--350},
  year         = {1993},
  url          = {https://doi.org/10.1147/rd.373.0331},
  doi          = {10.1147/RD.373.0331},
  timestamp    = {Fri, 13 Mar 2020 10:55:06 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/GuoC93.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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