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BibTeX record journals/ibmrd/GrovesHPPB93
@article{DBLP:journals/ibmrd/GrovesHPPB93, author = {Timothy R. Groves and John G. Hartley and Hans C. Pfeiffer and Denise Puisto and Donald K. Bailey}, title = {Electron beam lithography tool for manufacture of X-ray masks}, journal = {{IBM} J. Res. Dev.}, volume = {37}, number = {3}, pages = {411--420}, year = {1993}, url = {https://doi.org/10.1147/rd.373.0411}, doi = {10.1147/RD.373.0411}, timestamp = {Fri, 13 Mar 2020 10:55:00 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/GrovesHPPB93.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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