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BibTeX record journals/ibmrd/Gillespie84
@article{DBLP:journals/ibmrd/Gillespie84, author = {Sherri J. Gillespie}, title = {Resist Profile Control in E-Beam Lithography}, journal = {{IBM} J. Res. Dev.}, volume = {28}, number = {4}, pages = {454--460}, year = {1984}, url = {https://doi.org/10.1147/rd.284.0454}, doi = {10.1147/RD.284.0454}, timestamp = {Fri, 13 Mar 2020 10:54:19 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/Gillespie84.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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