BibTeX record journals/ibmrd/DhaliwalEGGKLPPRRST01

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@article{DBLP:journals/ibmrd/DhaliwalEGGKLPPRRST01,
  author       = {Rajinder S. Dhaliwal and
                  William A. Enichen and
                  Steven D. Golladay and
                  Michael S. Gordon and
                  Rodney A. Kendall and
                  Jon E. Lieberman and
                  Hans C. Pfeiffer and
                  David J. Pinckney and
                  Christopher F. Robinson and
                  James D. Rockrohr and
                  Werner Stickel and
                  Eileen V. Tressler},
  title        = {PREVAIL-Electron projection technology approach for next-generation
                  lithography},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {45},
  number       = {5},
  pages        = {615--638},
  year         = {2001},
  url          = {https://doi.org/10.1147/rd.455.0615},
  doi          = {10.1147/RD.455.0615},
  timestamp    = {Fri, 13 Mar 2020 10:54:20 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/DhaliwalEGGKLPPRRST01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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