BibTeX record journals/ibmrd/ChesebroACEFHMNSVW95

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@article{DBLP:journals/ibmrd/ChesebroACEFHMNSVW95,
  author       = {Donald G. Chesebro and
                  James W. Adkisson and
                  Lyman R. Clark and
                  Steven N. Eslinger and
                  Margaret A. Faucher and
                  Steven J. Holmes and
                  Raymond P. Mallette and
                  Edward J. Nowak and
                  Edward W. Sengle and
                  Steven H. Voldman and
                  Thomas W. Weeks},
  title        = {Overview of gate linewidth control in the manufacture of {CMOS} logic
                  chips},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {39},
  number       = {1-2},
  pages        = {189--200},
  year         = {1995},
  url          = {https://doi.org/10.1147/rd.391.0189},
  doi          = {10.1147/RD.391.0189},
  timestamp    = {Fri, 13 Mar 2020 10:54:36 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/ChesebroACEFHMNSVW95.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}