Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS.

Russell A. Budd Derek B. Dove John L. Staples Ronald M. Martino Richard A. Ferguson J. Tracy Weed Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS. 119-130 1997 41 IBM Journal of Research and Development 1&2 http://dx.doi.org/10.1147/rd.411.0119 db/journals/ibmrd/ibmrd41.html#BuddDSMFW97