BibTeX record journals/ibmrd/ArmacostHWYBKKHMNSNGGS99

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  author    = {Michael Armacost and
               Peter D. Hoh and
               Richard Wise and
               Wendy Yan and
               Jeffrey J. Brown and
               John H. Keller and
               George A. Kaplita and
               Scott D. Halle and
               K. Paul Muller and
               Munir D. Naeem and
               Senthil Srinivasan and
               Hung Y. Ng and
               Martin Gutsche and
               Alois Gutmann and
               Bruno Spuler},
  title     = {Plasma-etching processes for {ULSI} semiconductor circuits},
  journal   = {{IBM} Journal of Research and Development},
  volume    = {43},
  number    = {1},
  pages     = {39--72},
  year      = {1999},
  url       = {},
  doi       = {10.1147/rd.431.0039},
  timestamp = {Fri, 20 Apr 4458953 03:23:12 +velopment},
  biburl    = {},
  bibsource = {dblp computer science bibliography,}