BibTeX record journals/expert/MurdockH91

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@article{DBLP:journals/expert/MurdockH91,
  author       = {Janet L. Murdock and
                  Barbara Hayes{-}Roth},
  title        = {Intelligent Monitoring and Control of Semiconductor Manufacturing
                  Equipment},
  journal      = {{IEEE} Expert},
  volume       = {6},
  number       = {6},
  pages        = {19--31},
  year         = {1991},
  url          = {https://doi.org/10.1109/64.108948},
  doi          = {10.1109/64.108948},
  timestamp    = {Fri, 26 May 2017 22:50:52 +0200},
  biburl       = {https://dblp.org/rec/journals/expert/MurdockH91.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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