BibTeX record journals/dt/LiebmannT13

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@article{DBLP:journals/dt/LiebmannT13,
  author       = {Lars Liebmann and
                  J. Andres Torres},
  title        = {A Designer's Guide to Subresolution Lithography: Enabling the Impossible
                  to Get to the 14-nm Node [Tutorial]},
  journal      = {{IEEE} Des. Test},
  volume       = {30},
  number       = {3},
  pages        = {70--92},
  year         = {2013},
  url          = {https://doi.org/10.1109/MDAT.2013.2255911},
  doi          = {10.1109/MDAT.2013.2255911},
  timestamp    = {Fri, 13 Mar 2020 14:35:40 +0100},
  biburl       = {https://dblp.org/rec/journals/dt/LiebmannT13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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