BibTeX record journals/corr/abs-2109-01406

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@article{DBLP:journals/corr/abs-2109-01406,
  author       = {Tobias Gergs and
                  Borislav Borislavov and
                  Jan Trieschmann},
  title        = {An efficient plasma-surface interaction surrogate model for sputtering
                  processes based on autoencoder neural networks},
  journal      = {CoRR},
  volume       = {abs/2109.01406},
  year         = {2021},
  url          = {https://doi.org/10.48550/arXiv.2109.01406},
  doi          = {10.48550/ARXIV.2109.01406},
  eprinttype    = {arXiv},
  eprint       = {2109.01406},
  timestamp    = {Fri, 07 Jul 2023 16:13:00 +0200},
  biburl       = {https://dblp.org/rec/journals/corr/abs-2109-01406.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}