Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems

Peter Schneider Sven Reitz Andreas Wilde Günter Elst Peter Schwarz Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems http://arxiv.org/abs/0802.3089 2008 CoRR abs/0802.3089 db/journals/corr/corr0802.html#abs-0802-3089 informal publication